发明名称 |
Temperature controlled showerhead |
摘要 |
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
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申请公布号 |
US2009095218(A1) |
申请公布日期 |
2009.04.16 |
申请号 |
US20070974945 |
申请日期 |
2007.10.16 |
申请人 |
NOVELLUS SYSTEMS, INC. |
发明人 |
MEINHOLD HENNER;DOBLE DAN M.;LAU STEPHEN;WILSON VINCE;SRINIVASAN EASWAR |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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