| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp with a reflecting film for improving light extraction efficiency which has a structure to eliminate a problem that the reflecting film is damaged by discharge plasma. SOLUTION: An ultraviolet reflecting film (5) containing silica particles is formed on the outer face of a discharge container (2) made of silica glass, and electrodes (3) are arranged on the outside of this ultraviolet reflecting film (5). COPYRIGHT: (C)2009,JPO&INPIT |
