| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film turning fork oscillating piece with a piezoelectric thin film element for driving and a piezoelectric thin film element for detection, a piezoelectric thin film tuning fork oscillator, and an acceleration sensor. <P>SOLUTION: A piezoelectric thin film crystal oscillating piece 10 has the piezoelectric thin film elements 110 and 120 as the drive elements on the main surface 31, and the piezoelectric thin film elements 130 and 140 as the drive elements on the main surface 41. Also, the piezoelectric thin film crystal oscillating piece 10 has the piezoelectric thin film elements 150 and 160 as the detection elements on the main surface 32, and the piezoelectric thin film elements 170 and 180 as the detection elements on the main surface 42. The piezoelectric thin film element 110 has a lower electrode section 111, a piezoelectric thin film section 112, and an upper electrode section 113. The piezoelectric thin film element 150 has a lower electrode section 151, a piezoelectric thin film section 152, and an upper electrode section 153. The absolute value of piezoelectric output constant of the detection piezoelectric thin film sections (ZnO) 152, 162, 172, and 182 is larger than the absolute value of piezoelectric output constant of the drive piezoelectric thin film sections (PZT) 112, 122, 132, and 142. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
