Semiconductor device having high frequency wiring and dummy metal layer at multilayer wiring structure

摘要

A semiconductor device includes, a metal wiring, which functions as an inductor or transformer, formed on a first portion of a semiconductor substrate, a plurality of first dummy layers formed in a first density on the first portion of the semiconductor substrate, a plurality of second dummy layers formed in a second density on a second portion of the semiconductor substrate, the second portion surrounding the first portion, and a plurality of third dummy layers formed in a third density higher than the first and second densities on a third portion of the semiconductor substrate, the third portion surrounding the second portion.