发明名称 |
TEST STRUCTURE AND METHOD FOR RESISTIVE OPEN DETECTION USING VOLTAGE CONTRAST INSPECTION |
摘要 |
A test structure for resistive open detection using voltage contrast (VC) inspection and method for using such structure are disclosed. The test structure may include a comparator within the IC chip for comparing a resistance value of a resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test, wherein the result is detectable by the voltage contrast inspection.
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申请公布号 |
US2009096461(A1) |
申请公布日期 |
2009.04.16 |
申请号 |
US20070872213 |
申请日期 |
2007.10.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AHSAN ISHTIAQ;KETCHEN MARK B.;MCSTAY KEVIN;PATTERSON OLIVER D. |
分类号 |
G01R31/265 |
主分类号 |
G01R31/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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