PROBE CARD, INSPECTING APPARATUS AND INSPECTING METHOD

摘要

A probe card (10) is provided with a flat base section (11), and a plurality of probes (12) fixed on the lower surface of the base section (11). On the lower surface of the base section (11), cylindrical stoppers (13) are fixed at positions that match with four areas inside a dicing line which surrounds a semiconductor device to be tested. The stoppers (13) are not easily deformed compared with the probes (12). The height of the stoppers (13) is the same as that of the probes (12). A spring is fixed at the bottom section of each of the stoppers (13), and a position detecting probe (14) is fixed at the leading edge of the spring to protrude from the stopper (13).