| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanning observation apparatus capable of being easily set into high optical performance. SOLUTION: Before performing observation with an optical scanning probe 2 using light of a low-coherence light source 11, a shutter 27 is inserted in a reference light side optical path to create a state wherein interference light does not occur, in which state a reference member 6 is set to a focal position of a converging optical system 17 such that the output of a light detecting means 18 is maximal by moving the reference member 6 by a driving device 5 at an observation light optical path side of an optical scanning probe 2, following which the shutter 27 is opened, and the position of a mirror 22 at the reference light side is moved and set such that the output of the light detecting means 18 is maximal, thereby enabling the optical scanning observation apparatus 1 to be set to a state of suitable optical properties, easily and smoothly. COPYRIGHT: (C)2009,JPO&INPIT
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