发明名称 FILM FORMING METHOD AND FILM FORMING APPARATUS
摘要 <p>Provided are a film forming method and a film forming apparatus for forming a film at low cost. The film forming method includes (i) a step of melting a solid-state thin film material (51) into a melt, forming a bar-like body (51b) by solidifying the melt (51a) and pulling out the bar-like body (51b), (ii) a step of melting a part of the bar-like body (51b) to supply to a melt (vapor source) (51d), and (iii) a step of forming a thin film by using the melt (vapor source) (51d). The steps (i), (ii) and (iii) are performed in vacuum.</p>
申请公布号 WO2009047879(A1) 申请公布日期 2009.04.16
申请号 WO2008JP02486 申请日期 2008.09.09
申请人 PANASONIC CORPORATION;KAMIYAMA, YUMA;HONDA, KAZUYOSHI;BESSHO, KUNIHIKO;YANAGI, TOMOFUMI;SHINOKAWA, YASUHARU;SATO, TOSHITADA 发明人 KAMIYAMA, YUMA;HONDA, KAZUYOSHI;BESSHO, KUNIHIKO;YANAGI, TOMOFUMI;SHINOKAWA, YASUHARU;SATO, TOSHITADA
分类号 C23C14/24;B22D11/00;B22D11/04;B22D11/059;B22D27/02;C01B33/02 主分类号 C23C14/24
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