| 摘要 |
<p>A heat treatment apparatus is provided to generate negative pressure in the lateral of the outer end part of a hot plate by conducting a gas from the gas discharge hole according to a peripheral direction of the hot plate. A heating unit(61) is composed of a support ring(80), a bottom plate(81), a rectifying plate(82), a tubular member, and a face plate(84). The face plate is formed with metal which is easily processed such as aluminium, stainless, and copper alloy. A second gas exhaust port(85) is formed in the central part of the support ring, and a standing wall(86) is formed through the peripheral direction of the support ring. A supporting shaft(87) is installed at the floor side of the support ring, and the support ring is supported by the supporting shaft on a floor(7). The bottom plate is supported by the supporting shaft of the support ring, and a third gas exhaust port(89) is formed in the central part of the bottom plate. The rectifying plate is installed at the upside of the supporting member(91), and a fourth gas exhaust port(93) is formed in the central part of the rectifying plate.</p> |
