INSULATING FLANGE, INSULATING FLANGE MECHANISM AND VACUUM FILM DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an insulating flange capable of suppressing short circuit between conductive members.

SOLUTION: The insulating flange comprises an insulating annular first member 43a which is interposed between a pair of conductive members so that both end faces thereof are brought into contact with the pair of conductive members and fastened to the conductive members by a fastening member 45, and an insulating annular second member 43b inserted in an inner hole of the first member 43a so that both end faces thereof are not brought into contact with the conductive members.

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