WATER-SOLUBLE MACHINING OIL FOR FREE ABRASIVE GRAIN WIRE SAW

摘要

PROBLEM TO BE SOLVED: To provide a water-soluble machining oil exhibiting high machining precision and machining efficiency in cutting work of a brittle material with high hardness such as silicon and causing no problem such as foaming and to provide slurry containing the fluid and free abrasive grain and a cutting work method using the oil and the slurry for the brittle material such as silicon. SOLUTION: The water-soluble machining oil for a free abrasive grain wire saw comprises (A) 5-80 mass% glycerin, (B) 3-60 mass% diethylene glycol and/or propylene glycol, (C) 0.3-20 mass% aromatic polyvalent carboxylate, (D) 3-30 mass% polyhydric alcohol derivative, and (E) 3-88.7 mass% water. The slurry for cutting work contains this fluid and abrasive grains. The processing method using the oil and the slurry is provided for processing the brittle material. COPYRIGHT: (C)2009,JPO&INPIT