| 摘要 |
A member covered with a hard coating film having compressive stress and a thickness of 5µm or above, characterized in that the hard coating film has a face-centered cubic structure represented by the composition formula: (Me1-aXa)a(N1-x-yCxOy) [wherein Me is at least one element selected from the group consisting of Group 4a, 5a and 6a elements; X is at least one element selected from the group consisting of Al, Si, B and S; and a, x and y are contents (atomic ratios) of X, C and O respectively and a is a (Me1-aXa)/(N1-x-yCxOy) ratio with the proviso that they satisfy the relationships: 0.1=a=0.65, 0=x=0.1, 0=y=0.1, and 0.85=a=1.25] and that in the X-ray diffraction of the hard coating film, the peak intensity (Ir) of the (111) plane, the peak intensity (Is) of the (200) plane and the peak intensity (It) of the (220) plane satisfy the relationships: 2=Is/Ir and 0.2= It/Ir =1 with the half width, W(°), of the (200) plane of 0.7 or below (W=0.7). |
