发明名称 |
Aktives Schwingungsisolationssystem mittels hysteresefreier pneumatischer Lagerung |
摘要 |
The arrangement has a pneumatic insulator (2) for supporting a mass (1), and a pneumatic control circuit (6) for controlling a control valve (4). A movement sensor (9) determines a vibration distance of the mass and a vibration suppression control circuit (11) controls an actuator (10) based on the sensor. A dither-signal generator (8) is provided for manipulation of movement condition of a valve unit, where dither-vibration is produced by the mass. A dither-compensation circuit (12) is provided to control the actuator based on the suppression of the vibration of the mass. An independent claim is also included for a method of vibration insulation of a mass. |
申请公布号 |
DE502006003019(D1) |
申请公布日期 |
2009.04.16 |
申请号 |
DE20065003019T |
申请日期 |
2006.08.31 |
申请人 |
INTEGRATED DYNAMICS ENGINEERING GMBH |
发明人 |
HEILAND, PETER |
分类号 |
F16F15/027;F16F15/023;G03F7/20 |
主分类号 |
F16F15/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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