| 摘要 |
<p>A universal fluid flow adaptor is provided to prevent dead leg by preventing the contamination of a particle with a gas stick. A gas stick(400) comprises a gas stick inlet port(402), and a manual valve(404) is used for supplying or cutting off of a supply gas. A manual valve comprises a lockout/tag-out device(406), and a controller(408) controls the gas pressure or the supply gas. A pressure gauge(410) is used in order to monitor the pressure of the supply gas, and a filter(412) is used in order to remove the impurities of the supply gas. A primary shut off valve(414) is used for preventing arbitrary corrosion gas remaining in the gas stick. A test port(212) is located between gas delivery components such a filter and the primary shut off valve, and a test port(430) is coupled with the upper part of a substrate(422). An MFC is adjacent to the purge valve and measures the flow rate of the feed gas. A mixing valve(420) controls the amount of the mixed supply gas and the other supply gases.</p> |
