| 摘要 |
The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever 1 with a sharp probe tip (2) of a type used in Scanning Probe Microscopes (SPM' s) which further includes an integral resistive heating element (4). The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors. |
