Device for beam processing of workpieces, ion beam processing device

摘要

Device (2) for irradiating the surfaces of a workpiece (4) with an ion beam comprises a workpiece holder (10) which pivots about a first pivoting axis (A). An independent claim is also included for an on beam processing installation with the above device. Preferred Features: The device has a processing head (20) which pivots about a second pivoting axis (B). The workpiece holder is arranged on a first carriage (8) which runs along a first axis (Y) and the processing head is arranged on a second carriage which runs along a second axis (X). The carriages are arranged on a common base (26).