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发明名称
Menetelmä oksidikalvojen kasvattamiseksi
摘要
申请公布号
FI119844(B)
申请公布日期
2009.04.15
申请号
FI20070005291
申请日期
2007.04.26
申请人
ASM INTERNATIONAL N.V.,
发明人
ARO,EVA;HAUKKA,SUVI;TUOMINEN,MARKO
分类号
C23C16/44;H01L21/316
主分类号
C23C16/44
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代理人
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