发明名称 Thin plate storage container
摘要 A wafer storage container has a container body, a lid (44) and thin plate supporting members (51). The thin plate supporting member (51) has contacting portions (52) to support thin plates, supporting members (51) to support the contacting portions (52) elastically, and base supporting bar portions (54) to support the supporting portions (53). Tip end (53B) of each supporting portion (53) contacts with a contacting portion (52) of each supporting stage, and elastically supports the contacting portions (52) from both sides.
申请公布号 EP2048694(A1) 申请公布日期 2009.04.15
申请号 EP20080021842 申请日期 2003.11.27
申请人 发明人
分类号 H01L21/00;H01L21/68;H01L21/673 主分类号 H01L21/00
代理机构 代理人
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