摘要 |
A wafer storage container has a container body, a lid (44) and thin plate supporting members (51). The thin plate supporting member (51) has contacting portions (52) to support thin plates, supporting members (51) to support the contacting portions (52) elastically, and base supporting bar portions (54) to support the supporting portions (53). Tip end (53B) of each supporting portion (53) contacts with a contacting portion (52) of each supporting stage, and elastically supports the contacting portions (52) from both sides.
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