发明名称 MANIPULATOR ZUM DREHEN UND VERSCHIEBEN EINES PROBENHALTERS
摘要 <p>A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.</p>
申请公布号 AT426913(T) 申请公布日期 2009.04.15
申请号 AT20080150440T 申请日期 2008.01.21
申请人 FEI COMPANY;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;BOARD OF TRUSTEES AT THE UNIVERSITY OF ILLINOIS 发明人 DUDEN, THOMAS;SCHMID, ANDREAS;PETROV, IVAN;DONCHEV, TODOR;OLSON, ERIC;VAN DE WATER, JEROEN;WAGNER, RAYMOND;VAN DEN OETELAAR, JOHANNES;BRUGGERS, JAN WILLEM;SLINGERLAND, HENDRIK;OTTEVANGER, ADRIAAN
分类号 H01J37/20;B25J7/00;G01N23/22;G02B21/32;H01L41/09 主分类号 H01J37/20
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