| 摘要 |
<p>A magnetic gear for transferring a substrate is provided to improve a connection condition between a shaft and a connection gear by improving a right extent and a concentric extent between the shaft and the connection gear. A magnetic gear(100) for transferring a substrate includes a magnetic body(110), a fixing plate(120), a magnetic body holder(130), and a holder cover(140). The magnetic body is positioned on one side of the fixing plate. A shaft is positioned on the other side of the fixing plate. The magnetic body is arranged on an edge region of the fixing plate. The shaft is arranged on a central region of the fixing plate. The fixing plate is integrally formed with the magnetic body and the shaft. The magnetic holder loads the magnetic body, and has a first hole. The first hole of the magnetic holder corresponds to the magnetic body. The holder cover is arranged on the magnetic body, and has a second hole in a central region. The second hole of the holder cover is penetrated by the shaft.</p> |
