| 摘要 |
An apparatus and a method for treating substrates are provided to form the air current blocking fume regardless of the rotational direction of the rotation rod by changing the spiral direction of the wing portions of the brush cleaner part. A cleaning chamber(110) provides the process space for performing the substrate washing process. A plurality of shafts(120), the first spin transmitter(130), a plurality of rotation drivers(160), a belt(170), the second spin transmitter(180), and a brush cleaner part(190) are arranged in the process space. Each shaft comprises a rotation roller(121a) and a plurality of support rollers(121b). The first spin transmitter comprises a plurality of first magnets(131). The first spin transmitter is rotated by the torque delivered from the second spin transmitter. A rotary motor(150) is located adjacent to the rotation driver. The rotary motor provides the torque to the rotation drivers. The rotation driver which is adjacent to the rotary motor is connected to the belt. The second spin transmitter comprises a plurality of second magnets(181).
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