| 摘要 |
PROBLEM TO BE SOLVED: To provide a PZT-based crystalline film excellent in insulation resistance and dielectric loss and useable for electric parts such as capacitors and actuators. SOLUTION: This PZT-based crystalline film is composed of Pb(ZrxTi1-x)O3 (wherein 0<=x<=1) formed by hydrothermal synthetic method on a substrate. The PZT-based crystalline film is characterized by sealing defective part of the PZT-based crystalline film with a hydrophobic substance. |
