发明名称 |
PROCESSING METHOD FOR ORGANIC CRYSTAL, PROCESSING DEVICE FOR ORGANIC CRYSTAL, AND OBSERVING DEVICE FOR ORGANIC CRYSTAL |
摘要 |
<p>The short-pulse laser light 9 emitted from the short-pulse laser light source 1 is focused on and caused to irradiate an organic crystal 8 contained in a sample container 6 via a shutter 2, intensity adjusting element 3, irradiation position control mechanism 4, and focusing optical system 5. The sample container 6 is carried on a stage 7, and can be moved in three dimensions along the x axis, y axis and z axis in an x-y-z orthogonal coordinate system with the direction of the optical axis being taken as the z axis; furthermore, the sample container 6 can be rotated about the z axis. Working of the organic crystal 8 is performed by means of short-pulse laser light that is focused on and caused to irradiate the surface of the organic crystal 8. Prior to working, nitrogen is caused to jet onto the sample container 6 by a low-temperature gas jet device C that is a cooling device; consequently, the organic crystal 8 is cooled to -150°C or below. As a result, it is possible to work the object of working in a fixed state, and to increase the working efficiency by means of the short-pulse laser light that is used.</p> |
申请公布号 |
EP1733836(A4) |
申请公布日期 |
2009.04.15 |
申请号 |
EP20050728657 |
申请日期 |
2005.03.30 |
申请人 |
NIKON CORPORATION;ADACHI, HIROAKI;SASAKI, TAKATOMO;MORI, YUSUKE;TAKANO, KAZUFUMI;INOUE, TSUYOSHI;MATSUMURA, HIROYOSHI |
发明人 |
ADACHI, HIROAKI;KITANO, HIROSHI |
分类号 |
B23K26/12;B23K26/00;B23K26/03;B23K26/06;B23K26/14;B23K26/38;B23K26/40;C07D213/84;C08J3/18;G01N1/28;G01N23/20 |
主分类号 |
B23K26/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|