| 摘要 |
A 3D shape measuring method is provided to acquire measurement data of the high precision by introducing the data are according to the surface shape to the fixed sampling pitch regardless of the tilt angle of the measured position. A 3D shape measuring method measures the shape of the measured object as the probe which is supported in order to be moved the Z-axis is scanned to the plane of measurement of the measured object according to route. The approximate circle is drawn as the surface shape of the measured object contacts around the cross point of the central line of the measured object. The sampling pitch(s, s') acquiring measurement data of the measured object is calculated from the radius of the approximate circle.
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