发明名称 |
Sensor chip and apparatus for tactile and/or flow sensing |
摘要 |
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
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申请公布号 |
US7516671(B2) |
申请公布日期 |
2009.04.14 |
申请号 |
US20070709466 |
申请日期 |
2007.02.22 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
LIU CHANG;CHEN JACK;ENGEL JONATHAN |
分类号 |
G01L7/00;G01F1/28;G01F1/684;G01K7/01;G01K7/18;G01L5/22;G01L19/00;G01N3/06;G01P5/12 |
主分类号 |
G01L7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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