| 摘要 |
<p>A piezoelectric-actuator driving device and exposure apparatus including the same are provided to easily separate the shorted laminated unit from the driving circuit by arranging serially a plurality of laminated units. The piezoelectric actuator(100) has the structure of stacking a plurality of electrode layers(3) and plurality of thin piezoelectric ceramics board(2). The piezoelectric actuator performs charge and electric discharge operation through leads(4-1,4-2,4-3,5) connected to the electrode layer. The piezoelectric actuator is divided to laminated units(1-1,1-2,1-3). The electrode layer functioning as anode is connected to leads(4-1,4-2,4-3). The electrode layer functioning as cathode is connected to the lead(5) in common. Laminated units are electrically parallely connected. The laminated unit is serially arranged in expansion and retracting direction.</p> |
