METHOD FOR DEPOSITING AN ANTI-STATIC TRANSPARENT CONDUCTIVE LAYER FOR AN LCD AT A LOW TEMPERATURE

摘要

A method for depositing an anti-static transparent conductive layer for an LCD at a low temperature is provided to realize very superior visible light transmitting ratio properties and layer strength in a low temperature deposition condition for a fringe field switching driving liquid crystal display element. A target is made of a transparent conductive material. A cooling plate is adhered closely to the rear side of the target so that the target is continuously cooled. An ion beam is applied to the target with 800 to 1000eV projection energy(ST410). The ion beam is made of argon ion and oxygen ion. The ion beam is obtained by an ECR(Electro Cyclotron Resonance) mode by using a microwave. A process is performed in a process vacuum range of 10^-3 to 10^-4 Torr.