CHIP LOADING DEVICE FOR MICRO INSPECTION EQUIPMENT

摘要

An apparatus for transferring chips of the micro test equipment is provided to reduce the time to be required to inspection by automatically accurately loading the checking object within the microscope check. The up-down unit(13) is located in one side of the microscope assembly(10). The up-down unit performs the rising/descent operating of chuck by using the up-down block(12) combined in the load of the updown cylinder and updown cylinder(11). The rotary unit is assembled with the lower side of the up-down block. The rotary unit is combined in the load of the rotary cylinder and rotary cylinder(21). The vacuum chuck(17) is assembled with the spinning holder. The up-down unit moves the unit block(22) to the vertical direction on the post(18). The up-down unit controls the height between chuck and chip.