发明名称 |
Use of optical fourier transform for dimensional control in microelectronics |
摘要 |
A device for measuring the dimensional or structural characteristics of an object. A detector forms an optical Fourier transform image of an elemental surface of the object in an image focal plane. A processor produces data relating to at least one dimensional and/or structural characteristic of the object from the information provided by the detector.
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申请公布号 |
US7518739(B2) |
申请公布日期 |
2009.04.14 |
申请号 |
US20040571697 |
申请日期 |
2004.09.17 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
PETIT JEROME;CHATON PATRICK;GRAND GILLES;LEROUX THIERRY |
分类号 |
G01B11/14;G01B11/06;G01B11/24;G01B11/30;G01N21/956 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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