发明名称 High yield, high density on-chip capacitor design
摘要 A capacitance circuit assembly mounted on a semiconductor chip, and methods for forming the same, are provided. A plurality of divergent capacitors is provided in a parallel circuit connection between first and second ports, the plurality providing at least one Metal Oxide Silicon Capacitor and at least one Vertical Native Capacitor or Metal-Insulator-Metal Capacitor. An assembly has a vertical orientation, a Metal Oxide Silicon capacitor located at the bottom and defining a footprint, with a middle Vertical Native Capacitor having a plurality of horizontal metal layers, including a plurality of parallel positive plates alternating with a plurality of parallel negative plates. In another aspect, vertically asymmetric orientations provide a reduced total parasitic capacitance.
申请公布号 US7518850(B2) 申请公布日期 2009.04.14
申请号 US20060436248 申请日期 2006.05.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 KIM JONGHAE;KIM MOON J.;PLOUCHART JEAN-OLIVIER;TRZCINSKI ROBERT E.
分类号 H01G4/38;H01G4/00;H01L21/20;H01L27/108;H01L29/94 主分类号 H01G4/38
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