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发明名称
ETCH METHODS TO FORM ANISOTROPIC FEATURES FOR HIGH ASPECT RATIO APPLICATIONS
摘要
申请公布号
KR100892797(B1)
申请公布日期
2009.04.10
申请号
KR20070017755
申请日期
2007.02.22
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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HYDRAULIC POWER-ASSISTED STEERING
CONNECTION NETWORK FOR ADJUSTABLE CIRCUIT CONNECTION, IN PARTICULAR PROGRAMMABLE CIRCUITS