| 摘要 |
FIELD: physics. ^ SUBSTANCE: invention relates to measuring of parameters (thickness, structural state, electrophysical and thermophysical properties) especially hyperfine one-layer metal coats and the structural metal stratums superimposed on the dielectric warrants up-to-date high nanotechnologies. Heat eddy current method of the control of parameters of hyperfine metal coatings consists in the following: frequency of pulsing current is determined, quantity providing the peak degree of dependence to it checked thermophysical parameters ?=?2dx, the thermal generalised parameter accepted by the authors, in a range of ?=3?5, determining optimum change of thermophysical properties of the coat material on temperature dependences Tmax(t), ?max and determine value of an initial backlash h between the plane of the exciting reel and coat plane according to expression (0.1-0.2)?h/Rk?0.5, providing optimum change of thermophysical properties of coat and value of thermal generalised parameter ? in a range ?=3?5, and on target electrical signals of the heat eddy current transformer judge informative parametres of the coat material: the eddy current transformer - about thickness and electrophysical properties, thermal transformer - about thermophysical properties. ^ EFFECT: control method is improved. ^ 2 dwg |
