| 摘要 |
PROBLEM TO BE SOLVED: To secure hydrophilicity of an ITO layer and an SiN (inorganic silicon compound) layer as well as water repellency of a resin layer, in a manufacturing method of an organic EL element or the like. SOLUTION: With an object for treatment 10 with the ITO layer 12, the SiN layer 13, and a polyimide resin layer 14 exposed, respectively, halogen-content gas such as CF<SB>4</SB>is made in contact after being converted into plasma (a first process). Next, the object for treatment 10 is cleaned with aqueous cleaning liquid f<SB>L</SB>and dried (a second process). Then, inert gas such as N<SB>2</SB>is converted into plasma to make it in contact with the treatment object 10 (a third process). COPYRIGHT: (C)2009,JPO&INPIT
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