| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus for measuring the three-dimensional shape of an object to be inspected in a short time through the use of differences in focal points due to chromatic aberration. SOLUTION: The measuring apparatus 60 comprises: an image sensor 20 having a plurality of pixel regions 21 arranged in a plane; a coloring lens 11 for forming an image of the surface of the object to be inspected 62 on the image sensor by making light from the surface of the object incident; and an arithmetic processing part 30 for computing the height of the surface of the object to be inspected on the basis of the intensity of light received by a plurality of pixels constituting the image sensor and measuring the three-dimensional shape of the object to be inspected. The plurality of pixels divide received light for at least every two wavelengths and detects the intensity of the received light for every wavelength. The arithmetic processing part detects the difference in intensity level on the basis of the intensity of the received light of the two wavelengths from among the intensity of the received light for every wavelength detected by the plurality of pixels, measures the distance to the surface of the object to be inspected in a vertical direction on the basis of the difference in intensity level and acquires the three-dimensional shape of the object to be inspected. COPYRIGHT: (C)2009,JPO&INPIT
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