| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric micro-pump of a simple structure capable of transporting liquid without using a check valve and providing desired flow rate. SOLUTION: A first wall part 13b touching a diaphragm is formed at a section of a pump main body 10 opposing to an outer circumference part of a pump chamber 15 with putting the diaphragm 20 therebetween. A first opening part 21a is provided at a section of the diaphragm touching the wall part. A second opening part 12c is provided at a second wall part 12b which is a side wall of the pump main body and touches a side surface of a pump chamber side of the diaphragm. During stop, the first opening part 21a is closed by the first wall part 13b, and the second opening part 12c is closed by the diaphragm. The first opening part and the second opening part are alternately opened by bend displacement of the diaphragm accompanying vibration of a piezoelectric element to suck fluid from one opening part and discharge fluid from another opening part. Especially the maximum flow rate is provided when the diaphragm is driven at a third resonance mode. COPYRIGHT: (C)2009,JPO&INPIT
|
