| 发明名称 |
IMPROVED SILICON CARBIDE PARTICLES, METHODS OF FABRICATION, AND METHODS USING SAME |
| 摘要 |
<p>Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, the particles can comprise nano-sized carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.</p> |
| 申请公布号 |
CA2700408(A1) |
申请公布日期 |
2009.04.09 |
| 申请号 |
CA20082700408 |
申请日期 |
2008.10.03 |
| 申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
BAKSHI, ABHAYA K.;CHERIAN, ISAAC K. |
| 分类号 |
C09K3/14;C04B41/50 |
主分类号 |
C09K3/14 |
| 代理机构 |
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