| 摘要 |
An exhaust device of a semiconductor manufacturing apparatus, a teaching method thereof, and a method for controlling an amount of exhaust gas automatically are provided to minimize a process by calculating the unit movement quantity of an auto damper. An exhaust pipe is installed in the lower part of the semiconductor manufacturing apparatus. The exhaust pipe is used for discharging the gas generated from a processing tank. An auto damper(106) is installed in the exhaust pipe. The auto damper automatically controls an amount of the gas. An automatic control device(110) produces the unit movement quantity of the auto damper by sensing the moving range of the auto damper. The automatic control device controls the opening and closing of the auto damper.
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