| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost and compact piezoelectric vibration gyro needing no large space, capable of detecting angular velocities of two axes by using one vibrator which can be driven by one drive signal. <P>SOLUTION: The two-axis detection type vibrator 1 comprises: four sets of tuning forks composed of arms 2a, 2b, 2c, 2d, 2e, 2f, 2g and 2h; a base 4 positioned at the center; a coupling part for coupling the base with these tuning forks; a frame 5 disposed around the base 4; and beams 3a, 3b, 3c and 3d for connecting the base 4 and the frame 5. These are formed integrally by applying a penetration process using a sandblasting method to a flat plate made of silicon. The four sets of tuning forks are coupled with the base 4 in a radial cross-joint shape through the coupling part 6. <P>COPYRIGHT: (C)2009,JPO&INPIT |
