| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a base material with a bonding film equipped with a bonding film capable of efficiently bonding to a body to be bonded firmly with high accuracy at low temperatures, a bonding method capable of efficiently bonding the base material with the bonding film to the body to be bonded at low temperatures, and a highly reliable bonded body composed by strongly bonding the base material with the bonding film to the body to be bonded. <P>SOLUTION: This base material with the bonding film includes a substrate 2, the bonding film 3, and an intermediate layer 7 interposed between the substrate 2 and the bonding film 3, and can be bonded to an opposing substrate (other body to be bonded) 4. In the bonding film 3 provided to the base material with the bonding film, by applying energy to at least one portion of its region, a leaving group existing near a surface 35 is separated, and bonding performance with the opposing substrate 4 on the surface 35 of the bonding film 3 is developed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
