| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a table lift controlling a table position by using a simple mathematical expression after expressing a relation between data on a table position and a table position by the simple mathematical expression, in the table lift having stiffness with respect to a load and providing digital data of the table position. SOLUTION: In the X-shaped table lift, a guide roller moving along a lower table is driven in a horizontal direction by a pulse drive motor, and in a table lift vertically driving an upper table, data on an encoder incorporated in the pulse drive motor, and the data and a position of an upper table are expressed by the simple mathematical expression, and a vertical position of the upper table is controlled. COPYRIGHT: (C)2009,JPO&INPIT
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