发明名称 DISPLAY DEVICE DEFECT DETECTING METHOD AND DISPLAY DEVICE DEFECT DETECTING DEVICE
摘要 <p>[PROBLEMS] To provide a method for detecting a defect of a display device (50) for judging whether the defect can be repaired in a repair line or the defect requires the manufacturing line to be stopped. [MEANS FOR SOLVING PROBLEMS] A display device defect detecting method comprises a step of measuring a feature value of each partial region of a display device (P32), a defect counting step of counting regions judged to be defective on the basis of the measured feature values (P36), steps of stopping the manufacturing line of the display device if the number of detects counted is larger than a first threshold (P38, P42), a defect density calculating step of calculating the defect density in a predetermined area if the number of defects counted is smaller than the first threshold (P38), and steps of stopping the manufacturing line if the calculated defect density is higher than a second threshold (P40, P42).</p>
申请公布号 WO2009044519(A1) 申请公布日期 2009.04.09
申请号 WO2008JP02687 申请日期 2008.09.26
申请人 NIKON CORPORATION;NARA, KEI;HAMADA, TOMOHIDE 发明人 NARA, KEI;HAMADA, TOMOHIDE
分类号 G01N21/956;G01B11/02;G01M11/00;G02F1/13;G09F9/00;H01L51/50;H05B33/12 主分类号 G01N21/956
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