APPARATUS FOR PROCESSING WAFERS AND FABRICATING METHOD THEREOF

摘要

An apparatus for processing wafers and fabricating method thereof is provided to improve the durability by reinforcing sealing between two different members. In an apparatus for processing wafers and fabricating method thereof, a processing bath includes a space for processing a substrate while having an inner bath(102) and an outer bath(104). A processing solution supply unit supplies a processing solution and controls the concentration and temperature of the processing solution. The processing solution supply unit includes a processing solution storage(210) and a first valve(220) for controlling the supply of the processing solution. A circulation supply unit circulates the processing solution to the outer bath. A fixing member supports the processing bath and fixes various members.