| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate for a power module which is suppressed in progress of cracking in a heat cycle and improved in durability. <P>SOLUTION: A ceramic substrate 2 is made of a ceramic sintered body 20 comprising a plurality of kinds of AlN particles differing in shape, and is characterized in that the AlN particles have plate-like AlN particles 2a, fibrous AlN particles 2b, and spherical AlN particles 2c, the platelike AlN particles 2a having an outward shape size of 5 to 30 μm, the fibrous AlN particles 2b having a minor-axis size of 0.05 to 3 μm and an aspect ratio of 3 to 20 and the spherical AlN particles 2c having a particle size of 1 to 500 nm, and the ratio of those AlN particles occupying the ceramic substrate 2 is 5 to 50% by volume. <P>COPYRIGHT: (C)2009,JPO&INPIT |
