| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator device, capable of obtaining excellent displacement characteristics stably, and a liquid jetting head and a liquid jetting device. <P>SOLUTION: A piezoelectric layer 70 constituting a piezoelectric element is composed of a plurality of columnar crystal grains 72 continuous in its film thickness direction, wherein a ratio of the thickness and width of the columnar crystal grain 72 is in a range from 1 to 10, a difference between the width of the columnar crystal grain 72 at the end of either of a lower electrode film 60 side and an upper electrode film 80 side at the sectional face of the piezoelectric layer 70 in a thickness direction and the width of the columnar crystal grain at the end of the other side is within 10% with respect to the maximum width of the columnar crystal grain, and the depth of a recess formed on the outside face of each columnar crystal grain 72 set to be 20 nm or smaller. <P>COPYRIGHT: (C)2009,JPO&INPIT |
