PLASMA REACTOR WITH REDUCED ELECTRICAL SKEW USING ELECTRICAL BYPASS ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a plasma reactor improving plasma uniformity.

SOLUTION: An RF ground return current flow is diverted away from asymmetrical features of a reactor chamber by providing bypass current flow paths. One bypass current flow path avoids a pumping port 162 in a chamber floor and comprises a conductive symmetrical grill 200 extending from a sidewall up to a grounded pedestal base. Another bypass current flow path avoids a wafer slit valve and comprises an array of conductive straps bridging a sidewall portion occupied by a slit valve 128.

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