TWO-AXIS DRIVING ELECTROMAGNETIC SCANNER

摘要

PROBLEM TO BE SOLVED: To provide a 2-axis driving electromagnetic scanner in which a mirror can be directly driven while its deformation is prevented and in which electric power consumption can be reduced while noise is prevented to improve resolution.

SOLUTION: The electromagnetic scanner 100 includes: an outer driving unit 120 which is capable of rotating around the first axis; an inner driving unit 133 which is suspended from the outer driving unit 120 so as to rotate around a second axis perpendicular to the first axis; and a stage 131 which is located on an upper surface of the inner driving unit 133 so as to rotate together with inner driving unit 133. The stage 131 is connected to the inner driving unit 133 by a link unit 136 protruding from a center of a lower surface of the stage 131.

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