| 摘要 |
PROBLEM TO BE SOLVED: To provide a compressor capable of being stably used for shaft seal of compressed fluid with a simple structure even if the compressed fluid (process gas) contains an impurity easy to adhere such as polymer. SOLUTION: This compressor is provided with a fluid supply mechanism 20 for shaft sealing supplying fluid G1 for sealing shaft of same component as compressed fluid G into a casing 11 to seal the compressed fluid G. The fluid supply mechanism 20 for shaft sealing is provided with a feed pipe 21 in which fluid G1 for shaft sealing is circulated, first impurity removing mechanism 22a, 22b removing impurity contained in fluid G1 for shaft sealing, a detergent circulation mechanism 30 provided at a circulation direction upstream side of fluid for shaft sealing of the first impurity removing mechanism and having detergent cleaning the supply mechanism 20 for shaft sealing flow therein. The detergent circulation mechanism is provided with a communication pipe 31 in which the detergent flows, and a second impurity removing mechanism 32 removing impurity flowing in the communication pipe. COPYRIGHT: (C)2009,JPO&INPIT
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