发明名称 Force Actuator
摘要 Actuator arrangement, serving in particular to effect a deformation of an optical element, with a first, specifically fluidic-based actuator device (110.3), which is designed to exert on a body (108, 109.1) associated with the first actuator device (110.3) a first actuator force in an amount up a first maximum force value, wherein the arrangement includes a second, specifically fluidic-based actuator device (110.4), wherein the second actuator device (110.4) is designed to exert on the body (108, 109.1) associated with the first actuator device (110.3) a second actuator force in an amount up a second maximum force value, wherein further the second actuator device (110.4) is arranged in such a way in relation to the first actuator device (110.3) that the respective lines of action of the first actuator force and the second actuator force have at most a small distance from each other in the area of the their respective points of application on the body (108, 109.1), and wherein the second maximum value of the second actuator force is smaller than the first maximum value of the first actuator force.
申请公布号 US2009091720(A1) 申请公布日期 2009.04.09
申请号 US20080196391 申请日期 2008.08.22
申请人 CARL ZEISS SMT AG 发明人 BERTELE ANDREAS;VOGT PETER
分类号 G03F7/20;F15B11/17;G02B7/04;G03B27/68 主分类号 G03F7/20
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