发明名称 INDIUM OXIDE TARGET
摘要 <p>Disclosed is an indium oxide target comprising an oxide sintered body containing indium oxide, and tin if necessary, while containing not less than 0.0001 mole but less than 0.10 mole of an additional element (excluding Ba, Mg and Y), which has an oxygen binding energy of 100-350 kJ/mol, per 1 mole of indium.</p>
申请公布号 WO2009044888(A1) 申请公布日期 2009.04.09
申请号 WO2008JP68097 申请日期 2008.10.03
申请人 MITSUI MINING & SMELTING CO., LTD.;TAKAHASHI, SEIICHIRO;MIYASHITA, NORIHIKO 发明人 TAKAHASHI, SEIICHIRO;MIYASHITA, NORIHIKO
分类号 C23C14/08;C23C14/34;H01B5/14;H01B13/00 主分类号 C23C14/08
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