FUNCTIONAL BASE, PROCESS FOR PRODUCING THIN-FILM ELEMENT STRUCTURE, AND METHOD FOR TRANSFERRING THIN-FILM ELEMENT STRUCTURE ONTO OTHER SUBSTRATE

摘要

This invention provides a functional base, which has no possibility of elution of a peel layer during the formation of a device not having any possibility of elution of the peel layer during device formation, and a process for producing a thin-film element structure using the functional base, and a method for transferring a thin-film element structure using a functional base onto other substrate. The functional base (1) comprises a first substrate (3) for supporting the whole assembly, a first peel layer (5) for separating the first substrate (3), a first water vapor barrier layer (7) for preventing the penetration of water into the first peel layer (5), and a device layer (9).